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Product infos:

Thin Film Stress Monitor

Promulgator: :admin  Send date: :2011-09-23 17:03  Visitor: :
Product infos:
Introduce:

The kSA Multi-beam Optical Sensor (MOS) is a thin-film stress and wafer curvature measurement tool with integrated real-time feedback for process control. This patented laser-based system is highly sensitive and is proven to be extremely robust. With the optimized optics and detection system capturing an array of reflecting parallel laser beams, MOS uses proven real-time fitting algorithms to measure radius-of-curvatures up to 50 kilometers (depending on system geometry). Because the technique is optically based, it is compatible with harsh environments. MOS is ideally suited for real-time feedback to process control systems in the production or research environment.

> Features
•  Patented, high resolution 2D multi-beam optical sensor technique
•  Virtually immune to system vibration
•  Two-port or single-port geometries
•  Integrated real-time feedback

> Benefits
•  Real-time analysis of 2D thin-film stress and curvature
•  Evolution of stress during thermal cycling, buffer layer, and active layer growth
•  Stress and strain engineering to improve device performance
•  Optional real time thickness, growth rate, and optical constant (n, k) determination


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