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Product infos:

kSA BandiT Temperaturer Monitor

Promulgator: :admin  Send date: :2011-09-23 17:21  Visitor: :
Product infos:
Introduce:

The kSA BandiT is a non-contact, non-invasive, real-time, absolute wafer temperature sensor. Using the temperature-dependent optical absorption edge of semiconductor materials, the kSA BandiT provides wafer temperature monitoring in ranges that pyrometers cannot measure: substrates transparent in the IR (including GaN, SiC and ZnO), as well as low temperature monitoring, e.g., LT GaAs and Si deposition. Combining that capability with an integrated multi-wavelength pyrometer gives kSA BandiT the ability to monitor the full range of temperatures for most semiconductor substrate materials. Because kSA BandiT is insensitive to changing viewport transmission, stray light sources, and signal contribution from substrate heaters, kSA BandiT is the most accurate and repeatable optical method for measuring true substrate or film temperature.
 

By utilizing the kSA BandiT band-edge based temperature monitoring system along with sophisticated rotational synchronization techniques, full platen /susceptor temperature mapping and analysis of all wafers in real-time is now possible during MBE and MOCVD growth!

The latest kSA BandiT multi-wafer temperature monitoring software, combined with optional automated servo motor-controlled detector scanning, yields a powerful technique for obtaining full wafer and platen temperature mapping in real-time. The system is the only monitoring technique that can provide real-time 2-dimensional temperature information of all wafers during growth. Thermal uniformity profiles can now be monitored and adjusted via typical multiple filament heating zones used on today’s production MBE systems. The mapping system is also available for single wafer MBE and MOCVD systems where full wafer temperature uniformity measurements are desired.


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