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产品介绍:

纳米压印标准模板:线栅偏光器

发布者::admin  发布时间: :2011-11-30 16:35  浏览次数: :
产品介绍:
详细说明:

Wire Grid Polarizer


The Wire Grid Polarizer Standard Stamp is ideal for testing the fabrication of wire grid polarizers by nanoimprint lithography. The WGP stamp features a large active area of
12 mm x 12 mm with 50 nm lines and spaces - the 50 nm lines appear as grooves on the stamp. The standard stamp is suitable for both thermal and UV NIL by the use of an intermediate polymer stamp copy of the standard stamp.
  • Cost-effective stamp for testing of both NIL and wire grid polarizers
  • 50 nm wide grooves with 50 nm spacing
  • Fast delivery time, typically 3 weeks
 

Specifications

  Type A Type B
Stamp size 2 inch round wafer with flat 2 inch round wafer with flat
Stamp material Silicon Silicon
Active area 12 mm x 12 mm 6 mm x 6 mm
Stamp thickness 500 µm +/- 25 µm 500 µm +/- 25 µm
Structure size 50 nm wide grooves with 50 nm spacing 50 nm wide grooves with 50 nm spacing
Lateral tolerances +/- 10 nm +/- 10 nm
Structure depth 100 nm 100 nm
Vertical tolerances +/- 15 nm +/- 15 nm
Defect density Less than 0.01% of patterned area Less than 0.01% of patterned area
 
Anti-sticking layer (ASL) and dicing are optional.
 

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