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    巨力科技有限公司
    GiantForce Technology Co., Limited.
    地址:北京市通州区云景东路1号园景国际C-1319[101101]
    Tel:+86-10-57103010 
          +86-10-57299941 
          +86-10-57299942    
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产品介绍:

纳米压印标准模板: 纳米级

发布者::admin  发布时间: :2011-11-30 16:44  浏览次数: :
产品介绍:
详细说明:

Sub-Micro

The Sub-micro standard stamp is optimal for testing and process development within thermal and UV nanoimprint lithography and hot embossing. The stamp contains 3 different patterns (line gratings, pillar arrays and hole arrays) at 3 different dimensions (500 nm, 1 µm and 2 µm). All patterns are half-pitch patterns. The stamp is offered in Silicon and Fused Silica and the size of the stamp is 20 mm x 20 mm.
 
Specifications

Stamp size 20 mm x 20 mm
Stamp material Silicon or Fused Silica
Stamp thickness 1 mm
Structure size 500 nm - 2 µm
Etch depth 1 µm or 2 µm in Silicon. 500 nm in Fused Silica
Pattern field size 5 mm x 5 mm
Delivery time 3-4 weeks
 
Anti-sticking layer (ASL) and dicing are optional

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